Graded index microlenses and methods of design and formation
AssigneeRockwell Scientific Company
InventorHaluk Sankur
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Abstract
A microlens has a material composition gradient that varies along the z-axis of the microlens to provide desired refractive properties in conjunction with the surface shape of the microlens. A method for designing the microlens may include defining a microlens surface shape, defining desired refraction properties of the microlens, and determining a refractive index gradient of the microlens in the direction of the z-axis using the desired refraction properties and the defined surface shape of the microlens. A method for fabricating the microlens may include depositing a material having a material composition gradient that is determined based on a lens shape and desired refractive parameters, and forming the microlens having the desired surface shape in the material.
Claims34
A method for fabricating a microlens comprising:
- defining a microlens surface shape;
- defining desired refraction properties of the microlens;
- and
- continuously depositing a microlens material while varying deposition parameters to form a continuously varying microlens material composition such that the microlens material has a refractive index gradient in the direction of the z-axis for producing the desired refraction properties in conjunction with the defined microlens surface shape.
A microlens, comprising:
- a substrate;
- and
- a microlens body formed on the substrate and comprising a material deposited during a continuous deposition process while varying a composition of the material during the deposition process using varying processing parameters such that the material has a refractive index gradient in the direction of the z-axis providing predetermined refractive properties in conjunction with a surface shape of the microlens body.
A method of forming a microlens, comprising:
- determining a refractive index gradient in the direction of the z-axis of a deposited material having a material composition gradient in the direction of the z-axis, the material being deposited during a single deposition process while varying a composition of the material during the deposition process using varying processing parameters;
- determining a microlens shape providing desired refractive properties in conjunction with the refractive index gradient;
- and
- forming a microlens having the shape in the material.
A method for fabricating a microlens comprising:
- defining a microlens surface shape;
- defining desired refraction properties of the microlens;
- and
- sequentially forming layers of a microlens material during a single varying deposition process to form a continuously varying refractive index gradient in the direction of the z-axis for producing the desired refraction properties in conjunction with the defined microlens surface shape.
A method for fabricating a microlens comprising:
- defining a microlens surface shape;
- defining desired refraction properties of the microlens;
- and
- forming a microlens from a microlens material during a single varying formation process by varying a composition of the microlens material during the formation process using varying processing parameters such that the microlens material has a refractive index gradient in the direction of the z-axis for producing the desired refraction properties in conjunction with the defined microlens surface shape.
A method for fabricating a microlens comprising:
- defining a microlens surface shape;
- defining desired refraction properties of the microlens;
- and
- forming a microlens material having a refractive index gradient in the direction of the z-axis for producing the desired refraction properties in conjunction with the defined microlens surface shape;
- wherein the microlens surface shape is spherical and the refractive properties comprise hyperbolic refractive properties.
A microlens, comprising:
- a substrate;
- and
- a microlens body formed on the substrate and comprising a material deposited during a continuous deposition process while varying a composition of the material during the deposition process using varying processing parameters such that the material has a refractive index gradient in the direction of the z-axis providing predetermined refractive properties in conjunction with a surface shape of the microlens body;
- wherein the surface shape is spherical and the refractive properties comprise hyperbolic refractive properties.
Dependencies are inferred from the claim text.