High transmission optical inspection tools
AssigneeKLA-Tencor Technologies Corporation
InventorRichard William Solarz
Life of this patent
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Abstract
Techniques for increasing the percentage of light that is transmitted through optical inspection systems that operate in or near the ultraviolet and deep ultraviolet electromagnetic spectrums are described. Along with increasing the amount of light transmission, the techniques of the present invention also provide additional advantages such as reduction of ripple, increased ability to match inspection systems, and improving manufacturability. The techniques of the present invention involve using an auto-focus light source near the operational range of the inspection system and slightly raising the lower end of the operational range.
Claims32
A microscope optical inspection system comprising:
- at least one set of inspection optical lens elements;
- an illumination source that directs light into the set of inspection optical lens elements, wherein an operational bandwidth of light used for inspection is approximately within the ultraviolet and deep ultraviolet range or within portions thereof;
- an auto-focus device that directs an auto-focusing light beam into at least some of the set of inspection optical lens elements, wherein the wavelength of the auto-focusing light beam is proximate to or within the operational bandwidth.
A microscope optical inspection system comprising:
- at least one set of inspection optical lens elements;
- an illumination source that directs light into the set of inspection optical lens elements;
- an auto-focus device that directs an auto-focusing light beam into at least some of the set of inspection optical lens elements, wherein the auto-focus device uses an auto-focusing light source made of at least gallium and nitride.
A microscope optical inspection system comprising:
- at least one set of inspection optical lens elements;
- a layered formation of multiple anti-reflective coatings formed on each optical lens element wherein each layered formation is configured to transmit light wavelengths in the range of approximately 247-450 nanometers;
- an illumination source that directs light into the set of inspection optical lens elements, wherein the illumination source is a mercury-xenon lamp or laser and wherein an operational bandwidth of light used for inspection is approximately within the ultraviolet and deep ultraviolet range or within portions thereof;
- an auto-focus device that directs an auto-focusing light beam into at least some of the set of inspection optical lens elements, wherein the auto-focus device uses an auto-focusing light source made of at least gallium and nitride and wherein the wavelength of the auto-focusing light beam is approximately in the range of 405-465 nanometers.
Dependencies are inferred from the claim text.