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US 6,661,562 B2Granted
Optical modulator and method of manufacture thereof
AssigneesLucent Technologies Inc., Agere Systems Inc.
InventorJames A. Walker
Life of this patent
Estimating the term…
Abstract
An optical modulator having an optical modulator window coupled to a substrate and a method of manufacture thereof. In one embodiment, the optical modulator includes at least one drive electrode that adjusts a portion of the optical modulator window to attenuate light passing therethrough. The optical modulator further includes a sense element configured to measure a characteristic associated with the optical modulator window.
Claims21
An optical modulator comprising:
- a released membrane dielectric layer including an optical modulator window;
- at least one drive electrode coupled to said released membrane dielectric layer adjacent said optical modulator window and configured to adjust a portion of said optical modulator window to attenuate light passing therethrough;
- and
- a sense element coupled to said released membrane dielectric layer adjacent said optical modulator window and configured to measure a characteristic associated with said optical modulator window.
1 more element
An optical modulator, comprising:
- a substrate;
- a gap layer located over said substrate;
- a released membrane dielectric layer located over said gap layer and including a modulator region;
- a drive electrode coupled to said released membrane dielectric layer and located adjacent said modulator region;
- and
- a sense element coupled to said released membrane dielectric layer and located adjacent said modulator region.
3 more elements
A method of manufacturing an optical modulator, comprising:
- providing a substrate;
- forming a gap layer over said substrate;
- forming a released membrane dielectric layer including a modulator region over said gap layer;
- coupling a drive electrode to said released membrane dielectric layer and adjacent said modulator region;
- and
- coupling a sense element to said released membrane dielectric layer and adjacent said modulator region proximate said drive electrode.
3 more elements
Dependencies are inferred from the claim text.