Inspection systems using sensor array and double threshold arrangement
AssigneeApplied Materials, Inc.
InventorsGiora Eytan, Sagie Tsadka
Life of this patent
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Abstract
A two dimensional sensor array is used to collect light diffracted from the inspected substrate. The signal generated by each individual sensor is passed through a threshold. Those signals which are below the threshold are amplified and are summed up. The summed signal is then passed through a second threshold. Summed signals which pass the second threshold are flagged as indicating suspect locations on the substrate. In the preferred embodiment, the entire circuitry is provided in the form of a CMOS camera which is placed in the Fourier plane of the diffracted light.
Claims18
A system for inspection of substrates, comprising:
- a stage supporting the substrate, said stage rotating and translating the substrate in one direction;
- a light source providing a light beam illuminating a spot on the substrate at a grazing angle;
- a sensor array having a plurality of sensors thereon and positioned at a Fourier plane above the substrate to receive light scattered from the spot;
- a circuitry receiving signals from the sensor array and determining whether the signals indicate presence of a singularity on the substrate.
A system for inspection of substances, comprising:
- a stage supporting the substrate;
- a light source illuminating a spot on the substrate;
- a scanning mechanism providing a relative motion between the substrate and the spot so as to cause the spot to scan the substrate;
- a sensor array comprising a plurality of sensors and being disposed to collect light scattered from the spot;
- a filter receiving a signal from each of the plurality of sensors, and blocking any signal which is above a first threshold;
- an adder receiving and adding signals that pass the filter to provided an added signal;
- and;
- a comparator comparing the added signal to a second threshold and issuing a singularity indication if the added signal is above the second threshold.
A method for inspection of substrates, comprising:
- illuminating a spot on the substrate with a light beam;
- collecting light diffracted from the spot, by placing a sensor array at the Fourier plane of the diffracted light;
- comparing output of each sensor from the sensor array to a first threshold;
- adding up all the outputs that are lower than the first threshold to provide an added signal;
- comparing the added signal to a second threshold;
- and
- announcing a defect when the added signal is above the second threshold.
Dependencies are inferred from the claim text.