Semiconductor testing device
AssigneeFujitsu Limited
InventorsShigeyuki Maruyama, Kazuhiro Tashiro, Makoto Haseyama, Futoshi Fukaya
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Abstract
A semiconductor testing device is used for testing a semiconductor device which has at least one spherical connection terminal. The testing device includes an insulating substrate having an opening formed therein at a position corresponding to the position of the spherical connection terminal, and a contact member, formed on the insulating substrate, including a connection portion which is connected with the spherical connection terminal, at least the connection portion being deformable and extending into the opening.
Claims14
A semiconductor testing device for testing a semiconductor device which has a plurality of spherical connection terminals, said testing device comprising:
- an insulating substrate having a plurality of openings formed therein at a positions corresponding to positions of said plurality of spherical connection terminals;
- and
- a contact member, formed on said insulating substrate, comprising a connection portion connected with said spherical connection terminal, at least said connection portion being deformable and extending into said opening, wherein the contact member adheres to the insulating substrate and is shielded from the semiconductor device by the insulating substrate and only the connection portion of the contact member is deformable and shaped to accommodate the plurality of spherical connection terminals.
Dependencies are inferred from the claim text.