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US 6,661,095 B2Granted
Semiconductor device
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorMotomu Ukita
Life of this patent
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Abstract
The structure around a high-resistance element is formed in mirror symmetry to a plane perpendicular to a semiconductor substrate and the surface of the sheet. Specifically, high-resistance element, contact plugs and extending portion of interconnection layers are symmetric, each of the interconnection layers covering high-resistance element by the same amount. Thus, a semiconductor device of which degree of freedom on designing layout of interconnections which is to be connected to interconnection layers electrically connected to the high-resistance element via contact plugs can be attained.
Claims16
A semiconductor device, comprising:
- a semiconductor substrate;
- a resistance element formed above or within said semiconductor substrate;
- an interlayer insulation film formed on said resistance element
- a first contact hole penetrating said interlayer insulation film vertically and connected to said resistance element;
- a second contact hole penetrating said interlayer insulation film vertically and connected to said resistance element;
- a first interconnection layer formed on said interlayer insulation film and connected to said first contact hole;
- and
- a second interconnection layer formed on said interlayer insulation film and connected to said second contact hole;
- wherein
- above a region between said first contact hole and said second contact hole, said first interconnection layer and said second interconnection layer are formed not in symmetry to a prescribed plane perpendicular to said semiconductor substrate, but formed as layers of the same thickness at the same height and in point symmetry on a plane parallel to said semiconductor substrate.
7 more elements
A semiconductor device, comprising:
- a semiconductor substrate;
- a resistance element formed above said semiconductor substrate;
- an interlayer insulation film formed under said resistance element
- a first contact hole penetrating said interlayer insulation film vertically and connected to said resistance element;
- a second contact hole penetrating said interlayer insulation film vertically and connected to said resistance element;
- a first conductive unit formed under said interlayer insulation film and connected to said first contact hole;
- and
- a second conductive unit formed under said interlayer insulation film and connected to said second contact hole;
- wherein
- under a region between said first contact hole and said second contact hole, said first conductive unit and said second conductive unit are formed in symmetry to a prescribed plane perpendicular to said semiconductor substrate, or formed as layers of the same thickness at the same height and in point symmetry on a prescribed plane parallel to said semiconductor substrate.
7 more elements
A semiconductor device, comprising:
- a semiconductor substrate;
- a resistance element formed above said semiconductor substrate;
- a first interlayer insulation film formed under said resistance element;
- a second interlayer insulation film formed on said resistance element;
- a first conductive unit formed under said first interlayer insulation film;
- a second conductive unit formed under said first interlayer insulation film and not being identical to said first conductive unit;
- a third conductive unit formed on said second interlayer insulation film;
- a fourth conductive unit formed on said second interlayer insulation film and not being identical to said third conductive unit;
- a first contact hole penetrating said first interlayer insulation film and second interlayer insulation film vertically and connected to said first conductive unit and said third conductive unit;
- a second contact hole penetrating said first interlayer insulation film and second interlayer insulation film vertically and connected to said second conductive unit and said fourth conductive unit;
- a third contact hole penetrating said second interlayer insulation film vertically and connected to said resistance element and said third conductive unit;
- and
- a fourth contact hole penetrating said second interlayer insulation film vertically and connected to said resistance element and said fourth conductive unit;
- wherein
- under a region between said first contact hole and said second contact hole, said first conductive unit and said second conductive unit are formed in symmetry to a prescribed plane perpendicular to said semiconductor substrate, or formed as layers at the same height and in point symmetry on a prescribed plane parallel to said semiconductor substrate, and above the region between the third and the fourth contact holes, the third and the fourth conductive units are formed symmetrical to the prescribed plane perpendicular to the semiconductor substrate, or formed into layers of identical thickness and at the same height and in point symmetry on a prescribed plane parallel to the semiconductor substrate.
12 more elements
A semiconductor device, comprising:
- a semiconductor substrate;
- a resistance element formed within said semiconductor substrate;
- an interlayer insulation film formed on said resistance element
- a first contact hole penetrating said interlayer insulation film vertically and connected to said resistance element;
- a second contact hole penetrating said interlayer insulation film vertically and connected to said resistance element;
- a first interconnection layer formed on said interlayer insulation film and connected to said first contact hole;
- and
- a second interconnection layer formed on said interlayer insulation film and connected to said second contact hole;
- wherein
- above a region between said first contact hole and said second contact hole, said first interconnection layer and said second interconnection layer are formed in symmetry to a prescribed plane perpendicular to said semiconductor substrate, and
- said resistance element is an impurity diffusion layer formed within said semiconductor substrate.
8 more elements
Dependencies are inferred from the claim text.