Microelectronic capacitor structure embedded within microelectronic isolation region
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsKuo-Chyuan Tzeng, Chen-Jong Wang, Chung-Wei Chang
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsKuo-Chyuan Tzeng, Chen-Jong Wang, Chung-Wei Chang
Estimating the term…
Within a method for fabricating a capacitor structure, and a capacitor structure fabricated employing the method, there is formed within an isolation region adjoining an active region of a semiconductor substrate a laterally asymmetric trench which leaves exposed an upper sidewall portion of the active region of the semiconductor substrate. There is then formed within the laterally asymmetric trench a capacitor node layer which contacts the exposed upper sidewall portion of the active region of the semiconductor substrate and extends above the active region of the semiconductor substrate. The capacitor may be a storage capacitor with increased capacitance fabricated within a memory cell structure of decreased dimensions.
A capacitor structure comprising:
Dependencies are inferred from the claim text.