Apparatus for tilting a beam system
AssigneeFEI Company
InventorsAlexander Groholski, Riccardo Drainoni, Michael Tanguay
Life of this patent
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Abstract
The present invention provides a column tilt apparatus and method for providing an off-normal angle of incidence of a beam in a scanned beam system onto a substrate passing through the eucentric point that is electro-mechanically adjustable during operation while maintaining vacuum integrity of the column and work chamber, and without introducing significant vibrations.
Claims23
A method for moving a beam column of a beam system through an interval of angular displacement, comprising the steps of:
- providing a first subassembly affixed to a vacuum chamber and having a first opening;
- providing a second subassembly to which a beam column is affixed, the second subassembly having a second opening and being electro-mechanically drive-able through a path of angular displacement with respect lo the first subassembly;
- and
- providing a vacuum seal between the first opening and the second opening.
An apparatus for moving a beam column of a beam system through a path of angular displacement, comprising:
- a first subassembly affixed to a vacuum chamber and having a first opening;
- a second subassembly to which the beam column is mounted, the second assembly having a second opening:
- an electro-mechanical drive system to electro-mechanically drive the second subassembly through a path of angular displacement with respect to a position of the first subassembly;
- and
- a vacuum seal between the first opening and the second opening.
A beam system for interacting with a work piece, comprising:
- a first subassembly affixed to a vacuum chamber and having a first opening;
- a second subassembly to which the beam column is mounted, the second assembly having a second opening;
- an electro-mechanical drive system to electro-mechanically drive the second subassembly through a path of angular displacement with respect to a position of the first subassembly;
- a vacuum seal between the first opening and the second opening and
- a beam column mounted to the second subassembly for generating a beam to interact with the work piece.
Dependencies are inferred from the claim text.