Method of examining and/or modifying surface structures of a sample
AssigneeFraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
InventorWilhelm Bruenger
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Abstract
In a method of examining the surface structures of a sample or of modifying the surface structures of a sample by means of a beam impinging on the surface structure of the sample, gas is supplied discontinuously, preferably in a pulsed mode, at least in the area of impingement of the beam on the surface structure of the sample.
Claims14
A method of examining and/or modifying surface structures of a sample by means of a beam impinging on the surface structure of the sample, in the case of which gas is supplied at least in the area of impingement of the beam on the surface structure of the sample, wherein the a gas is supplied discontinuously.
Dependencies are inferred from the claim text.