Processes for nanomachining using carbon nanotubes

Abstract

Novel methods and devices for nanomachining a desired pattern on a surface of a conductive workpiece are disclosed. In one aspect, the method comprises using an electron beam emitted from one or more nanotubes to evaporate nanoscale quantities of material from the workpiece surface. The surface of the workpiece to be machined may be excited to a threshold energy to reduce the amount of power required to be emitted by the nanotube. In another aspect, a device is described for nanomachining a desired pattern on a surface of a conductive workpiece, comprising a vessel capable of sustaining a vacuum, a leveling support, a nanopositioning stage, and a laser for heating the workpiece. A nanotool is provided comprising at least one nanotube supported on an electrically conductive base, adapted to emit an electron beam for evaporating material from an electrically conductive workpiece.

Dependencies are inferred from the claim text.