Substrate for solar cell, solar cell having the same, and production process of solar cell
AssigneeCanon Kabushiki Kaisha
InventorsNoboru Toyama, Yuichi Sonoda, Yusuke Miyamoto
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Abstract
A substrate for a solar cell is provided which comprises a support having a metal surface and a zinc oxide film formed on the metal surface and having a water content of 7.5×10−3 mol/cm3 or less, preferably 4.0×10−4 mol/cm3 or more. Thereby, the increase of series resistance and the generation of shunt are prevented and the efficiency such as Jsc and the chemical stability are improved, thus obtaining a solar cell with a zinc oxide film having optimal overall characteristics.
Claims9
A substrate for a solar cell comprising a support having a metal surface and a zinc oxide film formed on the metal surface,
- wherein the zinc oxide film has a water content of not less than 4.0×10−4 mol/cm3 and not more than 7.5×10−3 mol/cm3, and
- wherein the metal surface comprises silver or a silver alloy.
A process of producing a solar cell comprising the steps of:
- forming a zinc oxide film on a support using an aqueous solution;
- drying the zinc oxide film at a first temperature;
- and
- forming a semiconductor layer on the zinc oxide film at a second temperature immediately after the drying step,
- wherein the second temperature is not higher than a temperature that is 100° C. higher than the first temperature.
Dependencies are inferred from the claim text.