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US 6,660,820 B1Granted
Low dielectric constant polymer and monomers used in their formation
AssigneeInternational Business Machines Corporation
InventorsArthur Martin, Wei-Tsu Tseng
Life of this patent
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Abstract
A new class of fluorinated arylacetylene compounds useful as monomers in the formation of polymers having low dielectric constant. These polymers, which are the reaction products of one of the fluorinated arylacetylene compounds, a diphenyl oxide biscyclopentadienone and, optionally, 1,3,5-tris(phenylacetylene)benzene, are useful in insulating microelectric device.
Claims17
A compound selected from the group consisting of a compound having the structural formula
- where q and r are the same or different and are integers of 2 to 5;
- a compound having the structural formula,
- where
- s and t are the same or different and are integers of 1 to 4;
- a compound having the structural formula
- s and t have the meanings given above;
- a compound having the structural formula
- where u, v, w, x, y and z are the same or different and are integers of 1 to 4;
- and a compound having the structural formula
- where q, r, s and t have the meanings given above.
7 more elements
Dependencies are inferred from the claim text.