Packaging of multiple active optical devices
AssigneeIntel Corporation
InventorsMikhail Naydenkov, Sivasubramaniam Yegnanarayanan, Quyen Huynh
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AssigneeIntel Corporation
InventorsMikhail Naydenkov, Sivasubramaniam Yegnanarayanan, Quyen Huynh
Estimating the term…
A cost effective method is provided for assembly of hybrid optoelectronic circuits requiring flip-chip bonding of multiple active optoelectronic devices onto common substrate or optical bench platform with fine pitch and high accuracy “after-bonding” alignment to the alignment features on substrate and/or to other elements of the hybrid circuit. A Flip-Chip Bonder equipped with high precision Bonding Arm and optical and mechanical system, heated substrate chuck and heated pick-up tool may be used both for alignment and thermal bonding of active component dies to corresponding bonding pads on the common substrate using gold-tin (Au—Sn) solder disposed between die bonding pad and the corresponding substrate bonding pad. During bonding of the first die, tin (Sn) diffuses from a eutectic composition of gold-tin (Au—Sn) solder to (gold (Au) on) the die-bonding pad and/or (gold (Au) on) the substrate bonding-pad resulting in transformation of the Au—Sn eutectic composition to a zeta-phase composition having much higher melting temperature as compared to that of a eutectic composition. As bonding of one or more subsequent dies is performed at temperatures equal to or slightly higher than the melting temperature of a eutectic composition and significantly lower than the melting temperature of a zeta-phase composition, the gold-tin (Au—Sn) solder at the bond of previously attached die does not melt and, consequently, the alignment is not compromised.
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Dependencies are inferred from the claim text.