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US 6,660,409 B1Granted
Electronic device and process for producing the same
AssigneesPanasonic Communications Co., Ltd., Hiroshi Nakashima
InventorsTakahiro Komatsu, Akira Gyoutoku, Shintaro Hara, Takafumi Hamano, Hiroshi Nakashima, Dawei Gao, Katsunori Muraoka, Katsuhiko Furukawa
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Abstract
Electrically functional electronic device including an organic electroluminescence device is protected with a dense protective film, e.g. a silicon oxynitride film, formed on at least one part of the outer surface of the device at a low temperature by ECR plasma sputtering can prevent permeation of moisture, oxygen etc. into the device from the outside.
Claims2
An organic electro-luminescence device comprising:
- a substrate,
- a light-emitting layer having a light-emitting region,
- an anode for injecting holes into the light-emitting layer,
- a cathode for injecting electrons into the light-emitting layer, and
- a protective film attached to the substrate,
- wherein the protective film comprises a silicon oxynitride layer and the protective film and the substrate enclose the light-emitting layer and the silicon oxynitride layer and the substrate enclose the anode, the light-emitting layer and the cathode.
3 more elements
An organic electro-luminescence device comprising:
- a substrate,
- a light-emitting layer having a light-emitting region,
- an anode for injecting holes into the light-emitting layer,
- a cathode for injecting electrons into the light-emitting layer, and
- a protective film attached to the substrate,
- wherein the protective film comprises a silicon oxynitride layer and the protective film and the substrate enclose the light-emitting layer, the protective film has a stacked layer structure comprising at least two different layers, and the silicon oxynitride layer and the substrate enclose the anode, the light-emitting layer, the cathode and layers other than the silicon oxynitride layer in the protective film.
3 more elements
Dependencies are inferred from the claim text.