Pulsed electromagnetic energy method for forming a film
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsAkiharu Miyanaga, Tohru Inoue, Shunpei Yamazaki
Life of this patent
Estimating the term…
Abstract
A method of forming a film by a plasma CVD process in which a high density plasma is generated in the presence of a magnetic field wherein the electric power for generating the plasma has a pulsed waveform. The electric power typically is supplied by microwave, and the pulsed wave may be a complex wave having a two-step peak, or may be a complex wave obtained by complexing a pulsed wave with a stationary continuous wave.
Claims19
A method for forming a film comprising the steps of:
- introducing a reactive gas into a reaction chamber;
- applying a pulsed electromagnetic wave to said reactive gas to convert said reactive gas into a plasma;
- applying a continuous electromagnetic wave to said reactive gas so that said continuous electromagnetic wave is superposed on said pulsed electromagnetic wave;
- and
- forming the film on a surface of an object in said reaction chamber,
- wherein a power value of said pulsed electromagnetic wave is higher than a power value of said continuous electromagnetic wave.
A method for forming a film comprising the steps of:
- introducing a reactive gas into a reaction chamber;
- applying a pulsed microwave to said reactive gas to convert said reactive gas into a plasma;
- applying a continuous electromagnetic wave to said reactive gas so that said continuous electromagnetic wave is superposed on said pulsed microwave;
- and
- forming the film on a surface of an object in the reaction chamber using the plasma,
- wherein a power value of said pulsed microwave is higher than a power value of said continuous electromagnetic wave.
A method for forming a film comprising the steps of:
- introducing a reactive gas into a reaction chamber;
- applying a pulsed electromagnetic wave to said reactive gas to convert said reactive gas into a plasma;
- applying a continuous electromagnetic wave to said reactive gas so that said continuous electromagnetic wave is superposed on said pulsed electromagnetic wave;
- and
- forming the film on a surface of an object in said reaction chamber,
- wherein a power value of said pulsed electromagnetic wave is higher than a power value of said continuous electromagnetic wave, and
- wherein a frequency of said pulsed electromagnetic wave is the same as a frequency of said continuous electromagnetic wave.
A method for forming a film comprising the steps of:
- introducing a reactive gas into a reaction chamber;
- applying a pulsed electromagnetic wave to said reactive gas to convert said reactive gas into a plasma;
- applying a continuous electromagnetic wave to said reactive gas so that said continuous electromagnetic wave is superposed on said pulsed electromagnetic wave;
- and
- forming the film on a surface of an object in said reaction chamber,
- wherein a power value of said pulsed electromagnetic wave is higher than a power value of said continuous electromagnetic wave, and
- wherein a frequency of said pulsed electromagnetic wave is different from a frequency of said continuous electromagnetic wave.
A method for forming a film comprising diamond-like carbon, said method comprising the steps of:
- introducing a reactive gas into a reaction chamber;
- applying a pulsed electromagnetic wave to said reactive gas to convert said reactive gas into a plasma;
- applying a continuous electromagnetic wave to said reactive gas so that said continuous electromagnetic wave is superposed on said pulsed electromagnetic wave;
- and
- forming the film comprising diamond-like carbon on a surface of an object in said reaction chamber,
- wherein a power value of said pulsed electromagnetic wave is higher than a power value of said continuous electromagnetic wave, and
- wherein a frequency of said pulsed electromagnetic wave is the same as a frequency of said continuous electromagnetic wave.
A method for forming a film comprising diamond-like carbon, said method comprising the steps of:
- introducing a reactive gas into a reaction chamber;
- applying a pulsed electromagnetic wave to said reactive gas to convert said reactive gas into a plasma;
- applying a continuous electromagnetic wave to said reactive gas so that said continuous electromagnetic wave is superposed on said pulsed electromagnetic wave;
- and
- forming the film comprising diamond-like carbon on a surface of an object in said reaction chamber,
- wherein a power value of said pulsed electromagnetic wave is higher than a power value of said continuous electromagnetic wave, and
- wherein a frequency of said pulsed electromagnetic wave is different from a frequency of said continuous electromagnetic wave.
Dependencies are inferred from the claim text.