Nanolayered coated cutting tool and method for making the same
AssigneeKennametal Inc.
InventorsRonald M. Penich, Parag L. Hegde, Aharon Inspektor
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Abstract
A nanolayered coated cutting tool that includes a substrate that has a surface with a coating on the surface thereof. The coating comprises a plurality of coating sets of alternating nanolayers of titanium nitride and titanium aluminum nitride wherein each coating set has a thickness up to about 100 nanometers. The coating includes a bonding region and an outer region. The bonding region comprises a plurality of the coating sets wherein the thickness of each coating set increases as the set moves away from the surface of the substrate. The outer region comprises a plurality of the coating sets wherein the thickness of each coating set is about equal.
Claims55
A process for making a nanolayered coated member, the process comprising the steps of:
- providing a substrate having a surface;
- providing a metal target;
- providing a metal aluminum target;
- rotating a substrate between the metal target and the metal aluminum target;
- supplying electrical power at a first level to the metal target;
- supplying electrical power at the first level to the metal aluminum target;
- depositing a coating comprising coating sets of alternating nanolayers on the surface of the substrate;
- changing the deposition rate of the alternating nanolayers over a selected period of time during which electrical power supplied to the metal target and the metal-aluminum target changes from the first level to a second level;
- and
- controlling the deposition rate of the alternating nanolayers for a period of time after the electrical power reaches the second level.
A process for making a nanolayered coated member, the process comprising the steps of:
- providing a substrate having a surface;
- providing a metal-aluminum target;
- providing a metal-aluminum-carbon target;
- rotating a substrate between the metal-aluminum target and the metal-aluminum-carbon target;
- supplying electrical power at a first level to the metal-aluminum target;
- supplying electrical power at the first level to the metal-aluminum-carbon target;
- depositing a coating comprising coating sets of alternating nanolayers on the surface of the substrate;
- changing the deposition rate of the alternating nanolayers over a selected period of time during which electrical power supplied to the metal-aluminum target and to the metal-aluminum-carbon target changes from the first level to a second level;
- and
- controlling the deposition rate of the alternating nanolayers for a period of time after the electrical power reaches the second level.
A process for making a nanolayered coated member, the process comprising the steps of:
- providing a substrate having a surface;
- providing a metal target;
- providing a metal aluminum target;
- providing a metal-aluminum-carbon target;
- rotating a substrate between the metal target and the metal aluminum target and the metal-aluminum-carbon;
- supplying electrical power at a first level to the metal target;
- supplying electrical power at the first level to the metal aluminum target;
- supplying electrical power at the first level to the metal-aluminum-carbon target;
- depositing a coating comprising coating sets of alternating nanolayers on the surface of the substrate;
- changing the deposition rate of the alternating nanolayers over a selected period of time during which electrical power supplied to the metal target and to the metal-aluminum target and to the metal-aluminum-carbon target changes from the first level to a second level;
- and
- controlling the deposition rate of the alternating nanolayers for a period of time after the electrical power reaches the second level.
Dependencies are inferred from the claim text.