US 6,660,124 B1Granted

Polishing system and polishing method

AssigneeTokyo Electron Limited

InventorsTetsu Kawasaki, Mitsuaki Iwashita

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Abstract

A wafer having a polished surface of copper is caused to contact a pad serving as an abrasive member, and the copper is polished while supplying a slurry containing mechanical and chemical polishing particles. Thereafter, when a finishing member of diamond having a large number of fine protrusions is scanned while the finishing member contacts the surface of the pad, a chelating agent, such as oxtail acid, is supplied to the surface of the pad as a dressing solution. Thus, reaction products, which have been produced by the reactions of copper with the slurry and which have adhered to the surface of the pad to be difficult to be dissolved in water, are dissolved, so that the reaction products can be removed in a short time. Thus, the reaction products having adhered to the abrasive member after polishing the wafer can be remove in a short time, so that the time required to carry out the CMP process can be shortened.

Claims7

Dependent claims

A polishing system comprising:

a polishing unit for polishing a metal constituting a polished surface of a substrate, the polishing unit comprising an abrasive member having a polishing surface, wherein the polishing unit polishes the metal by supplying an abrasive solution functioning as a chemical abrasive to the polishing surface of the abrasive member while relatively sliding the polished surface of the substrate on the abrasive member;
a chemical supply unit for supplying a chemical to the polishing surface of the abrasive member, the chemical being configured to dissolve a reaction product produced by a reaction of the metal with the abrasive solution;
a polishing surface finishing unit for scraping the polishing surface of the abrasive member to recover polishing capacity of the abrasive member by supplying a finishing fluid to the polishing surface of the abrasive member while relatively sliding on the polishing surface of the abrasive member;
and
a cleaning unit for supplying a cleaning solution to the polishing surface of the abrasive member to remove the chemical and the reaction product dissolved by the chemical from the polishing surface.

2 more elements

Dependencies are inferred from the claim text.