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US 6,660,104 B2Granted
Dual cassette centrifugal processor
AssigneeSemitool, Inc.
InventorsRaymon F. Thompson, Clif Neil
Life of this patent
Estimating the term…
Abstract
In a method for processing flat media, such as semiconductor wafers, first and second cassettes carrying wafers are loaded into a dual position rotor. The cassettes are restrained within the rotor by support tubes and hold down pins. Processing capacity is increased, as two cassettes are simultaneously processed.
Claims9
A method of processing wafers comprising the steps of:
- loading a first cassette of wafers into a rotor;
- loading a second cassette of wafers into the rotor until a back surface of the second cassette contacts a front surface of the first cassette;
- securing the first and second cassettes in the rotor with a plurality of support tubes, wherein at least one of the support tubes is a lateral support tube including a plurality of hold down pins for holding the first and second cassettes against at least one lower support tube;
- rotating the rotor;
- and
- applying a process fluid onto the wafers.
3 more elements
A method of processing wafers comprising the steps of:
- loading a first cassette of wafers into a rotor;
- moving the first cassette of wafers into the rotor until a back surface of the first cassette comes into contact with a back surface on the rotor;
- loading a second cassette of wafers into the rotor;
- moving the second cassette of wafers into the rotor until a back surface of the second cassette contacts a front surface of the first cassette;
- securing the first and second cassettes within the rotor by holding the first and second cassettes via a plurality of hold down, pins on lateral support tubes of the rotor;
- rotating the rotor;
- and
- applying a process fluid onto the wafers.
5 more elements
Dependencies are inferred from the claim text.