System for processing a workpiece

An apparatus for processing a workpiece, comprising:

• a first rotor;
• a second rotor engageable with the first rotor to form a chamber;
• at least one workpiece support on at least one of the first and second rotors, for holding a workpiece at a workpiece position within the chamber;
• a motor linked to at least one of the first and second rotors, for rotating the rotors about a rotation axis;
• and
• a dividing member on one of the first and second rotors, extending radially inwardly towards the axis of rotation, and with the dividing member located at the workpiece position.

An apparatus for processing a workpiece comprising:

• a first rotor;
• a second rotor moveable to contact the first rotor and to form a chamber between them;
• a first fluid inlet in the first rotor, for supplying a first fluid onto a first side of the workpiece in the chamber;
• a second fluid inlet in the second rotor, for supplying a second fluid onto a second side of the workpiece in the chamber
• a dividing structure aligned with a peripheral edge of the workpiece to maintain separation of fluids flowing off of first and second surfaces of the workpiece.

An apparatus for processing a workpiece comprising:

• a chamber;
• an upper chamber inlet for supplying a first fluid into an upper region of the chamber for distribution of the first fluid across an upper surface of a workpiece by centrifugal force, and a lower chamber inlet for supplying a second fluid into a lower region of the chamber for distribution of the second fluid across a lower surface of the workpiece by centrifugal force;
• at least one workpiece support adapted to support a workpiece in the chamber;
• a fluid supply system in communication with the upper and lower chamber inlets;
• a dividing structure in the chamber aligned with a peripheral edge of the workpiece;
• a first fluid outlet at a first peripheral region of the chamber above the dividing structure to allow removal of the first fluid flow from the chamber;
• and
• a second fluid outlet at a second peripheral region of the chamber below the dividing structure to allow removal of the second fluid flow from the chamber.

An apparatus for processing a workpiece comprising:

• a chamber substantially conforming to the workpiece,
• a first chamber inlet for supplying a first fluid flow into a first region of the chamber for distribution of the first fluid across a first surface of a workpiece by centrifugal force;
• a second chamber inlet for supplying a second fluid into a second region of the chamber for distribution of the second fluid across a second surface of the workpiece by centrifugal force;
• a first fluid supply system connected to the first chamber inlet;
• a second fluid supply system connected to the second chamber inlet;
• and
• an edge structure aligned with a peripheral edge of the workpiece to maintain separation of first and second fluids flowing off of the first and second surfaces of the workpiece.