Apparatus for forming liquid film

An apparatus for forming a film comprising:

• a liquid output nozzle continuously outputting a liquid to a surface of a substrate having projections and depressions;
• a detector detecting a ratio of projections to depressions in a predetermined region of the surface of the substrate;
• a driver moving the liquid output nozzle and the substrate relatively to each other;
• and
• a supply controller controlling an amount of liquid to be supplied to the predetermined region of the surface depending upon the detected ratio of projections to depressions while the driver is moving the liquid output nozzle and the substrate relatively to each other by the driver,
• wherein said supply controller controls liquid output from the liquid output nozzle at a constant amount and said driver varies a relative moving speed of the liquid output nozzle to the substrate.

An apparatus for forming a film comprising:

• a liquid output nozzle continuously outputting a liquid to a surface of a substrate having projections and depressions;
• a detector detecting a ratio of projections to depressions in a predetermined region of the surface of the substrate;
• a driver moving the liquid output nozzle and the substrate relatively to each other;
• and
• a supply controller controlling an amount of liquid to be supplied to the predetermined region of the surface depending upon the detected ratio of projections to depressions while the driver is moving the liquid output nozzle and the substrate I relatively to each other by the driver,
• wherein said supply controller changes the amount of liquid output from the liquid output nozzle.

An apparatus for forming a film comprising:

• a liquid output nozzle continuously outputting a liquid to a surface of a substrate having projections and depressions;
• a detector detecting a ratio of projections to depressions in a predetermined region of the surface of the substrate;
• a driver moving the liquid output nozzle and the substrate relatively to each other;
• and
• a supply controller controlling an amount of liquid to be supplied to the predetermined region of the surface depending upon the detected ratio of projections to depressions while the driver is moving the liquid output nozzle and the substrate relatively to each other by the driver,
• wherein said detector detects the ratio of projections and depressions in a mined region on the basis of the patterning data to be formed on the substrate.

An apparatus for forming a film comprising:

• a liquid output nozzle continuously outputting a liquid to a surface of a substrate having projections and depressions;
• a detector detecting a ratio of projections to depressions in a predetermined region of the surface of the substrate;
• a driver moving the liquid output nozzle and the substrate relatively to each other;
• and
• a supply controller controlling an amount of liquid to be supplied to the predetermined region of the surface depending upon the detected ratio of projections to depressions while the driver is moving the liquid output nozzle and the substrate relatively to each other by the driver,
• wherein any one of an antireflection material, a resist material, a low dielectric material, an insulating material, and a wiring material added to a solvent is used as the liquid.