Substrate support mechanism and substrate rotation device

A substrate rotation device which receives a disc substrate having an opening at its center from a substrate holder which holds the outer rim of said substrate with clicks and rotates said substrate in a processing chamber isolated from atmosphere, comprising;

• a substrate support mechanism including a first hollow cylindrical member, a central shaft disposed in the hollow portion of said first hollow cylindrical member so as to be pushed in the axial direction by a first spring, said central shaft having at one end portion a tapered portion of which diameter increases toward the end, and a plurality of radially movable members disposed on one end face of said first hollow cylindrical member, each radially movable member being pushed inwardly by a second spring and having a click to grip the substrate at the inner rim, whereby the axial motion of the said central shaft is converted into the radial direction motion of said radially movable members to grip and release said substrate;
• a mechanism for moving said first hollow cylindrical member in the axial direction, by which said plurality of radially movable members are inserted into the opening of said substrate to the position where said clicks become at nearly the same level as said substrate;
• a mechanism for moving said central shaft in the axial direction;
• and
• a mechanism for rotating said first hollow cylindrical member while the clicks of said radially movable members grip said substrate.

A substrate support mechanism which holds an inner rim of a disc substrate having an opening at its center, comprising:

• a hollow cylindrical member;
• a central shaft disposed in a hollow portion of said cylindrical member so as to be pushed in an axial direction by a first spring, said central shaft having at one end portion a tapered portion of which diameter increases toward the end;
• and
• a plurality of radially movable members disposed on the end face of said cylindrical member, each radially movable member being pushed inwardly by a second spring and having a click to grip the inner rim of said substrate;
• whereby the axial motion of the said central shaft causes the tapered portion to engage the plurality of radially movable members to radially move said radially movable members against the respective second springs to grip and release said substrate.