Method and apparatus for doping a melt with a dopant
AssigneeWacker Siltronic Gesellschaft fur Halbleitermaterialien AG
InventorsMartin Weber, Erich Gmeilbauer, Robert Vorbuchner, Walter Neumaier, Peter Vilzmann
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Abstract
A method for doping a melt with a dopant has the melt being provided in a crucible. The dopant is introduced into a vessel and the vessel is immersed in the melt, the dopant being transferred into the melt through an opening which forms in the vessel. There is also an apparatus which comprises a vessel containing the dopant and a device which is connected to the vessel, for lowering the vessel into a melt and for lifting the vessel out of the melt, the vessel being provided with an opening which is blocked by a closure piece which is of the same type of material as the melt and melts when it is brought into contact with the melt.
Claims5
A method for doping a melt with a dopant comprising,
- providing a crucible containing a melt;
- introducing a dopant into a quartz vessel having a first opening which is directed to the melt;
- partly blocking the first opening by means of a semiconductor wafer, thereby narrowing the first opening to form a gap;
- immersing the quartz vessel into the melt, the gap allowing rapid penetration of the melt and quick mixing of the melt and the dopant;
- dissolving the semiconductor wafer in the melt;
- and
- transferring the dopant into the melt through the first opening.
Dependencies are inferred from the claim text.