Platen with debris control for chemical mechanical planarization
AssigneeApplied Materials, Inc.
InventorsShijian Li, Jayakumar Gurusamy, Manoocher Birang, Fred C. Redeker
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Abstract
Generally, a method and apparatus for cleaning a backside of a web of polishing material. In one embodiment, the apparatus includes a platen having a support surface adapted to support the backside the web and a web cleaner disposed on the platen and adjacent the backside of the web. A method for cleaning a web of polishing material is also provided. In one embodiment, the method includes the steps of supporting a portion of the web of polishing media on a platen, advancing a portion of the web onto the platen, and cleaning the unrolled portion of the web.
Claims30
Apparatus for supporting a web of polishing media having a polishing side and a backside, the apparatus comprising:
- a platen having a support surface adapted to support the backside of the web;
- and
- a web cleaner coupled to the platen adjacent the backside of the web and disposed between a supply roll of unused polishing media and the platen.
Apparatus for supporting a web of polishing media having a polishing side and a backside, the apparatus comprising:
- a platen having a support surface adapted to support the web of polishing media;
- and
- a means for cleaning the backside of the web, the means being coupled to the platen and disposed between a supply roll of unused polishing media and the platen.
A processing system comprising:
- one or more webs of polishing material, each web having a polishing side and a backside;
- one or more polishing heads each adapted to retain a substrate against a respective web in a polishing pattern;
- one or more platens having a support surface having the backside of the web disposed thereon;
- and
- a web cleaner coupled to at least one of the one or more platens and disposed between a supply roll of unused polishing media and the platen, wherein the backside of the web is disposed proximate the web cleaner.
A method for cleaning the backside of a web of polishing media, comprising the steps of:
- supporting a portion of the web of polishing media on a platen;
- cleaning an unused portion of a backside of the web;
- and
- advancing the web onto the platen;
- wherein the step of cleaning the unused portion of the web further comprises applying at least one of tacky roller;
- or an electrostatic charge to the backside of the web.
Dependencies are inferred from the claim text.