Ink-jet printhead and method for producing the same
AssigneeHewlett-Packard Development Company, L.P.
InventorsBrian J. Keefe, Ali Emamjomeh, Roger J. Kolodziej, Michael J. Regan, Harold Lee Van Nice
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Abstract
An ink-jet printhead is provided having a thin film substrate comprising a plurality of thin film layers; a plurality of ink firing heater resistors defined in said plurality of thin film layers; a polymer fluid barrier layer; and a carbon rich layer disposed on said plurality of thin film layers, for bonding said polymer fluid barrier layer to said thin film substrate.
Claims15
A thin film printhead, comprising:
- a thin film substrate comprising:
- a plurality of thin film layers;
- a plurality of ink firing heater resistors defined in said plurality of thin film layers;
- a polymer fluid barrier layer;
- and
- a diamond like carbon layer disposed on said plurality of thin film layers, with said polymer fluid barrier layer disposed directly on said diamond like carbon layer, for bonding said polymer fluid barrier layer to said thin film substrate, such that said diamond like carbon layer is formed between said plurality of ink firing heater resistors and said polymer fluid barrier layer and wherein,
- said diamond like carbon layer is removed in those areas of said thin film layers that form said ink firing heater resistors.
The thin film printhead of claim 8, wherein the diamond like carbon layer comprises carbon having an sp2 to sp3 ratio in the range from about 1:2.0 to about 1:2.4.
The thin film printhead of claim 9, wherein the diamond like carbon layer comprises carbon having an sp2 to sp3 ratio in the range from about 1:2.2 to about 1:2.3.
The thin film printhead of claim 11, wherein said carbon containing gas is methane.
A thin film printhead, comprising:
- a thin film substrate comprising a plurality of thin film layers;
- a plurality of ink firing heater resistors defined in said plurality of thin film layers;
- a polymer fluid barrier layer;
- and
- a diamond like carbon layer disposed on said plurality of thin film layers, with said polymer fluid barrier layer disposed directly on said diamond like carbon layer, for bonding said polymer fluid barrier layer to said thin film substrate, such that said diamond like carbon layer is formed between said plurality of ink firing heater resistors and said polymer fluid barrier layer and wherein.
- said diamond like carbon layer is removed in those areas of said thin film layers that form said ink firing heater resistors;
- said diamond like carbon layer having been formed by inserting said substrate into a plasma enhanced chemical vapor deposition chamber;
- evacuating the chamber;
- introducing into the chamber a noble gas and a carbon containing gas;
- delivering power to the chamber;
- maintaining power for a certain length of time sufficient to allow for formation of said carbon layer on said substrate;
- evacuating the chamber;
- venting the chamber with a noble gas;
- removing said substrate with the deposited diamond like carbon layer from the chamber.
The thin film printhead of claim 14, wherein the plasma enhanced chemical vapor deposition chamber is a parallel plate chamber.
A thin film printhead, comprising:
- a thin film substrate comprising a plurality of thin film layers;
- a plurality o f ink ejection elements defined in said plurality of thin film layers;
- a polymer fluid barrier layer;
- and a diamond like carbon layer disposed on said plurality of thin film layers, with said polymer fluid barrier layer disposed directly on said diamond like carbon layer, for bonding said polymer fluid barrier layer to said thin film substrate, such that said diamond like carbon layer is formed between said plurality of ink firing heater resistors and said polymer fluid barrier layer and wherein,
- said diamond like carbon layer is removed in those areas of said thin film layers that form said ink firing heater resistors.
A thin film printhead, comprising:
- a thin film substrate comprising a plurality of thin film layers;
- a plurality of ink firing heater resistors defined in said plurality of thin film layers;
- a polymer fluid barrier layer;
- and
- a diamond like carbon layer disposed on said plurality of thin film layers, with said polymer fluid barrier layer disposed directly on said diamond like carbon layer, for bonding said polymer fluid barrier layer to said thin film substrate, such that said diamond like carbon layer is formed between said plurality of ink firing beater resistors and said polymer fluid barrier layer, and wherein said diamond like carbon layer is removed in those areas of said thin film layers that form said ink firing heater resistors.
Dependencies are inferred from the claim text.