US 6,659,441 B2Granted

Travelling worktable apparatus

AssigneeHitachi, Ltd.

InventorsMasaki Mizuochi, Yoshimasa Fukushima, Masami Katsuyama, Toshinori Kobayashi

Life of this patent

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Abstract

In a travelling worktable apparatus including a roller guide unit to guide a travelling table. Deformation of a sample table caused in association with precision of the guide unit such as deviation in precision of rail attachment and precision of rollers is prevented while keeping rigidity of the roller guide. This keeps a fixed distance between a bar mirror unit and a sample on the sample table. For this purpose, the Y table (top table) of the prior art is subdivided into a travelling table to hold the roller guide and a sample table to mount a sample thereon. These tables are fixed by a pin which can be more easily deformed than the tables and are linked with each other by an elastic body.

Claims1

Dependent claims

A travelling worktable apparatus, comprising:

a fixed base;
an intermediate table mounted on said fixed base with a first guide disposed therebetween, said intermediate table being capable of achieving a reciprocating motion;
a top table mounted on said intermediate table with a second guide disposed therebetween, said top table being capable of achieving a reciprocating motion in a direction which intersects a direction of the reciprocating motion of said intermediate table;
and
a measuring mirror disposed on said top table, wherein said top table comprises:
a travelling table for holding said second guide;
a sample table disposed on said travelling table for mounting a sample thereon;
and
a bolt for restricting said travelling table and said sample table with a spacer disposed between the travelling table and the sample table, said bolt being more easily deformed than said travelling table and said sample table.

6 more elements

Dependencies are inferred from the claim text.

Facts

Application: 10/206,343Filed 29 Jul 2002 · division
Priority: JP 2000-8711123 Mar 2000
Published: US 2003/0020225 A130 Jan 2003
Granted: 9 Dec 2003
Term ends: Not estimatedThe source records don’t support an estimate.

Classification6 codes

H10P 72/50
Handling or holding of wafers, substrates or devices during manufacture or treatment thereof: for positioning, orientation or alignment
B23Q 1/58
With sliding pairs only , the sliding pairs being the first two elements of the mechanism: a single sliding pair
B23Q 1/621
With perpendicular axes, e.g. cross-slides: a single sliding pair followed perpendicularly by a single sliding pair
B23Q 17/2495
Using special electromagnetic means or methods: using interferometers

Family

Application09/793,941Parent of this division · filed 27 Feb 2001
US 2003/0020225 A1Pre-grant publication · published 30 Jan 2003
US 6,446,950 B2Parent of this division
US 2001/0024008 A1Published application
US 6,659,441 B2This patent

From the US filing history. Foreign family members aren’t listed.