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US 6,658,920 B2Granted
Leak detector pump
AssigneePfeiffer Vacuum GmbH
InventorKarl Abbel
Life of this patent
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Abstract
A leak detector pump, including a housing having a gas outlet and a plurality of gas inlet unions, components of a high vacuum pump located in the housing, a gas analyzer associated with the housing, a union for introducing test fluid into the housing, a plurality of valve members located in the housing for controlling gas flow, and a plurality of connection elements located in the housing for guiding the gas flow between different components of the leak detector pump.
Claims4
A leak detector pump, comprising a housing having a gas outlet and a plurality of gas inlet unions;
- components of a high vacuum pump located in the housing;
- a gas analyzer associated with the housing;
- a union for introducing test fluid into the housing;
- a plurality of valve members integrated in a wall of the housing for controlling gas flow in the housing;
- and a plurality of connection elements likewise integrated in a wall of the housing for guiding the gas flow between different components of the leak detector pump.
2 more elements
Dependencies are inferred from the claim text.