Carbon nitride coating for optical media discs
AssigneeRichter Precision, Inc.
InventorsVal L. Lieberman, J. Hans Richter, Yasuo Yamazaki
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Abstract
The disclosure is for a film coating which yields increased life for optical media molds and the method and apparatus for making such a film. The film is a carbon nitride layer of 0.5 to 5.0 microns thickness with 2% to 45% nitrogen coated on an underlayer. One method of making the carbon nitride film is by the use of a pulsed carbon arc to generate a carbon plasma while injecting nitrogen into the vacuum chamber in which the arc is created. Another method is to generate a radio frequency plasma in a vacuum chamber into which acetylene and nitrogen gas are injected. The carbon nitride is formed by the combination of nitrogen with the carbon from the acetylene.
Claims8
A coating on an optical media mold comprising an underlayer and a carbon nitride film formed on top of the underlayer.
A coating on an optical media mold comprising an underlayer produced by the use of an electron beam generated between a cathode and a crucible, and a carbon nitride film formed on top of the underlayer.
A coating on an optical media mold comprising an underlayer and a carbon nitride film formed on top of the underlayer by the use of a pulsed arc discharge to combine carbon from a carbon arc with nitrogen.
A coating on an optical media mold comprising an underlayer and a carbon nitride film formed on top of the underlayer by producing a radio frequency plasma to combine carbon from acetylene gas with nitrogen gas.
A coating on an optical media mold comprising at least one layer of diamond-like carbon and at least one layer of carbon nitride film.
A coating on an optical media mold comprising an underlayer, at least one layer of diamond-like carbon, and at least one layer of carbon nitride film.
A coating on an optical media mold comprising a layer of carbon nitride with a thickness in the range of between greater than 1.6 and 5 microns.
A coating on an optical media mold comprising a layer of carbon nitride with the nitrogen content in the range of between 2 and 45 atomic percent.
Dependencies are inferred from the claim text.