Method and apparatus for transporting substrates in OLED process
AssigneeRiTdisplay Corporation
InventorsYih Chang, Jung-Lung Liu, Chih-Jen Yang, Chih-Ming Kuo, Jih-Yi Wang, Tien-Rong Lu
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Abstract
A method and an apparatus for transporting substrates in all organic light emitting diode (OLED) process is disclosed, which has a transferring chamber provided for transporting substrates between processing modules and the atmosphere condition therein is able to be adjusted to be the same as the processing module by an atmosphere conditioner unit. According to the present invention, the substrates are not contaminated by moisture and the process operation and the factory layout are more flexible. Moreover, the OLED yield is improved.
Claims11
A method for transporting substrates in an organic light emitting diode (OLED) process, comprising the following steps:
- a. moving a transferring chamber to a processing module;
- b. adjusting atmosphere conditions inside said transferring chamber to be the same as inside of said processing module;
- c. communicating said transferring chamber and said processing module;
- d. transporting substrates between said transferring chamber and said processing module;
- e. discommunicating said transferring chamber and said processing module to form independent closed spaces;
- and
- f. moving said transferring chamber away from said processing module.
Dependencies are inferred from the claim text.