Method for removing carrier film from a singulated die

Abstract

An apparatus which reduces the surface area with which a carrier film adheres to a die, including a plate member including laterally spaced supports preferably, the apparatus also includes a vacuum source operatively connected to the plate member Upon placement of a carrier film having an array of semiconductor diet adhered thereto onto the plate member, the dice are proximate the supports. The vacuum pulls air from the spaces between the supports, which partially releases the carrier film from the bottom surface of at Least sonic of the dice. The apparatus may also include a die removal mechanism such as a vacuum toilet type die pick-up mechanism, an extendable member die plunge-dip mechanism, or a combination thereof. The present invention also includes a method for reducing the surface area with which a carrier film adheres to a die to facilitate removal thereof.

Dependencies are inferred from the claim text.