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US 6,658,710 B2Granted
Method for fabricating an annular ring transducer
AssigneeAgilent Technologies, Inc.
InventorsJ. Fleming Dias, Richard D. Pering, Henry E. Karrer, Richard J. Pittaro
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Abstract
A method is provided for fabricating an annular ring transducers for determining the velocity of a fluid flow. A novel and accurate flow measurement system is fabricated for measuring transit time of a fluid flow using chirp signals, and a pneumotachometer with annular ring transducers is also disclosed.
Claims5
A method for fabricating an annular ring transducer, comprising the steps of:
- providing a cylindrical piece of piezoelectric member;
- removing an outer portion of said piezoelectric member to form a slanted outer face that is approximately 45 degrees, said slanted outer face is located at a distance from the center of said cylindrical piece;
- removing a center portion of said piezoelectric member, said center portion having a radius smaller than said distance;
- removing an inner portion of said piezoelectric member to form a slanted inner face that is approximately 45 degrees, wherein a portion of said piezoelectric member positioned between said slated outer face and said slanted inner face formed an angled ring transducer with a thickness t, where t is given by f=V/2 t, and where f is a resonant frequency of the annular ring transducer, and V is an ultrasonic velocity of propagation in said piezoelectric member;
- forming a layer of base material over said slanted inner face and said slanted outer face;
- forming a layer of matching material over said base material layer;
- beating said piezoelectric member to a first temperature below a Curie temperature of said piezoelectric member;
- applying a voltage to said slanted inner face and said slanted outer face;
- heating said piezoelectric member at a second temperature that is less than said first temperature;
- and
- allowing said piezoelectric member to cool down to room temperature while applying said voltage to said slanted inner face and said slanted outer face.
8 more elements
Dependencies are inferred from the claim text.