Bistable micromirror with contactless stops
AssigneePTS Corporation
InventorLilac Muller
Life of this patent
Estimating the term…
Abstract
A microstructure for steering light is provided that mitigates stiction. A substrate is provided on which a structural linkage is connected to support a structural film. The structural film includes a reflective coating. A hold electrode is connected with the substrate at a position laterally beyond an orthogonal projection of the structural film on the substrate. It is configured to hold the structural film electrostatically in a tilted position with respect to the substrate upon application of a potential difference between the structural film and the hold electrode. Because of its positioning with respect to the structural film, it is ensured that the structural film is not in contact with the substrate when the structural film is being held by the hold electrode.
Claims27
A microstructure for steering light, the microstructure comprising:
- a substrate;
- a structural linkage connected with the substrate and supporting a structural film, the structural film including a reflective coating;
- and
- a first hold electrode connected with the substrate at a position laterally beyond an orthogonal projection of the structural film on the substrate and configured to hold the structural film electrostatically in a first tilted position with respect to the substrate upon application of a potential difference between the structural film and the first hold electrode.
A method for fabricating a microstructure for steering light, the method comprising:
- forming a first hold electrode on a substrate;
- forming a structural linkage on the substrate;
- forming a structural film on the structural linkage;
- and
- depositing a reflective coating on the structural film;
- wherein the first hold electrode is at a position laterally beyond an orthogonal projection of the structural film on the substrate and configured to hold the structural film electrostatically in a first tilted position with respect to the substrate upon application of a potential difference between the structural film and the first hold electrode.
A microstructure for steering light, the microstructure comprising:
- support means;
- tiltable micromirror means connected with the support means;
- and
- first electrostatic-field-generation means for providing an electrostatic field to hold the tiltable micromirror means in a tilted position with respect to the support means, wherein the first electrostatic-field-generation means is connected with the support means at a position laterally beyond an orthogonal projection of the tiltable micromirror means on the support means.
Dependencies are inferred from the claim text.