Method and apparatus for measuring gap, method and apparatus for measuring shape and method for manufacturing liquid crystal device

A gap measuring apparatus characterized by comprising:

• a light source for applying a plurality of different color lights to an object to be measured having light transmission properties;
• a color camera for picking up images of interference fringes formed by the light transmitted through the object to be measured;
• an image memory for storing images picked up by the color camera;
• computing means for obtaining respective intensities of the color lights in the images at each of predetermined positions of each image, so as to compute an actual ratio among the obtained intensities of the color lights for each of the predetermined positions;
• a reference data memory for storing theoretical ratios among intensities of said color lights in an image, correspondingly to each of preliminarily set gap values;
• and
• gap value comparing/determining means for determining gap values of a plurality of points of a gap provided in the object to be measured according to the actual ratio and the theoretical ratios.

A gap measuring apparatus characterized by comprising:

• a light source for applying light to an object to be measured having light transmission properties;
• a color camera for picking up images of interference fringes formed by the light transmitted through the object to be measured;
• a filter for transmitting a plurality of different color lights to the color camera;
• an image memory for storing images picked up by the color camera;
• computing means for obtaining respective intensities of the color lights in the images at each of predetermined positions of each image to compute an actual ratio among the obtained intensities of the color lights for each of the predetermined positions;
• a reference data memory for storing theoretical ratios among intensities of said color lights in an image correspondingly toe ach of preliminarily set gap values;
• and
• gap value comparing/determining means for determining gap values of a plurality of points of a gap provided in the object to be measured according to the actual ratio and the theoretical ratios.

A gap measuring apparatus characterized by comprising:

• a light source for emitting a plurality of different color lights;
• a color camera for picking up images of light interference fringes;
• optical means for directing the lights from the light source toward an object to be measured and directing reflected lights thereof from the object to be measured toward the color camera;
• an image memory for storing images of the interference fringe formed by the lights from the optical means and picked up by the color camera;
• computing means for obtaining respective intensities of the color lights in the images at each of predetermined positions of each image, so as to compute an actual ratio among the obtained intensities of the color lights for each of the predetermined positions;
• a reference data memory for storing theoretical ratios among intensities of said color lights in an image, correspondingly to each of preliminarily set gap values;
• and
• gap value comparing/determining means for determining gap values of a plurality of points of a gap provided in the object to be measured according to the actual ratio and the theoretical ratios.

A gap measuring apparatus characterized by comprising:

• a light source for emitting light;
• a color camera for picking up images of light interference fringes;
• a filter for transmitting a plurality of different color lights to the color camera;
• optical means for directing the light from the light source toward an object to be measured and directing reflected light thereof from the object to be measured toward the color camera;
• an image memory for storing images of the interference fringe formed by the light from the optical means and picked up by the color camera;
• computing means for obtaining respective intensities of the color lights in the image at each of predetermined positions of each image, so as to compute an actual ratio among the obtained intensities of the color lights for each of the predetermined positions;
• a reference data memory for storing theoretical ratios among intensities of said color lights in an image correspondingly to each of preliminarily set gap values;
• and
• gap value comparing/determining means for determining gap values of a plurality of points of gap provided in the object to be measured according to the actual ratio and the theoretical ratios.

A shape measuring apparatus characterized by comprising:

• a light source for applying a plurality of different color lights to a measurement object having light transmission properties;
• a light transmission plate shaped element with a flat surface disposed apart by a gap from the object to be measured;
• a color camera for picking up images of interference fringes formed by the lights transmitted through the object to be measured and the light transmission plate shaped element;
• an image memory for storing images picked up by the color camera;
• computing means for obtaining respective intensities of the color lights in the images at each of predetermined positions of each image, so as to compute an actual ratio among the obtained intensities of the color lights for each of the predetermined positions;
• a reference data memory for storing theoretical ratios among intensities of said color lights in an image correspondingly to each of preliminarily set gap values;
• gap value comparing/determining means for determining gap values of a plurality of a gap provided in the object to be measured according to the actual ratio and the theoretical ratios;
• and
• gap value/shape converting means for determining a shape of the object to be measured on the basis of the gap values obtained by the gap value comparing/determining means.

A shape apparatus characterized by comprising:

• a light source for applying light to an object to be measured having light transmission properties;
• a light transmission plate-shaped element with a flat surface disposed apart by a gap from the object to be measured;
• a color camera for picking up images of interference fringes formed by the lights transmitted through the measurement object and the light transmission plate-shaped element;
• a filter for transmitting a plurality of different color lights to the color camera;
• an image memory for storing images picked up by the color camera;
• computing means for obtaining respective intensities of the color lights in the images at each of predetermined positions of each images so as to compute an actual ratio among the obtained intensities of the each color lights for each of the predetermined positions;
• a reference data memory for storing theoretical ratios among intensities of said color lights in an image correspondingly to each of preliminarily set gap values,
• gap value comparing/determining means for determining gap values of a plurality of points of a gap provided in the object to be measured according to the actual ratio and the theoretical ratios;
• and
• gap value/shape converting means for determining a shape of the object to be measured on the basis of the gap values obtained by the gap value comparing/determining means.

A shape measuring apparatus characterized by comprising:

• a light source for emitting a plurality of different color lights;
• a light transmission plate shaped element with a flat surface disposed apart by a gap from an object to be measured;
• a color camera for picking up images of light interference fringes;
• optical means for directing the light from the light source toward the object to be measured and the light transmission plate shaped element and directing reflected lights thereof from the object to be measured and the light transmission plate shaped element toward the color camera;
• an image memory for storing images of the interference fringe formed by the lights from the optical means and picked up by the color camera;
• computing means for obtaining respective intensities of the color lights in the images at each of predetermined positions of each image, so as to compute an actual ratio among the obtained intensities of the each color lights for each of the predetermined positions;
• a reference data memory for storing theoretical ratios among the intensities of said color lights in an image correspondingly to each of preliminarily set gap values;
• gap value comparing/determining means for determining gap values of a plurality of points of a gap provided in the object to be measured according to the actual ratio and the theoretical ratios;
• and
• gap value/shape converting means for determining a shape of the object to be measured on the basis of the gap values obtained by the gap value comparing/determining means.

A shape measuring apparatus characterized by comprising:

• a light source for emitting light;
• a light transmission plate-shaped element with a flat surface disposed apart by a gap from an object to be measured;
• a color camera for picking up images interference fringes of light;
• a filter for transmitting a plurality of different color lights to the color camera;
• optical means for directing the light from the light source toward the object to be measured and the light transmission plate-shaped element and directing reflected lights thereof from the object to be measured and the light transmission plate-shaped element toward the color camera;
• an image memory for storing images of the interference fringes formed by the lights from the optical means and picked up by the color camera;
• computing means for obtaining respective intensities of the color lights in the images at each of predetermined positions of each image, so as to compute an actual ratio among the obtained intensities of the color light;
• a reference data memory for storing theoretical ratios among the intensities of said color lights in an image correspondingly to each of preliminarily set gap values;
• gap value comparing/determining means for determining gap values of a plurality of points of a gap provided in the object to be measured according to the actual ratio the theoretical ratios;
• and
• gap value/shape converting means for determining a shape of the object to be measured on the basis of the gap values obtained by the gap value comparing/determining means.

A shape measuring apparatus characterized by comprising:

• a light source for emitting a composite light of a plurality of different color lights;
• a color camera for picking up images of light interference fringes;
• a reference reflective member for reflecting light;
• optical means for directing the light from the light source as an object light toward an object to be measured so as to direct reflected light thereof from the object to be measured toward the color camera, and for directing the light from the light source as a reference light toward the reference reflective member so as to direct reflected light thereof from the reference reflective member toward the color camera;
• an image memory for storing images of the interference fringes formed by the lights from the optical means and picked up by the color camera;
• computing means for obtaining respective intensities of the color lights of the images at each of predetermined positions of each image, so as to compute an actual ratio among the obtained intensities of the color light;
• a reference data memory for storing theoretical ratios among the intensities of said color lights in an image correspondingly to each of preset optical path differences;
• optical path difference comparing/determining means for determining differences at a plurality of points between an optical path between the optical means and the object to be measured and an optical path between the optical means and the reference reflective member according to the actual ratio and the theoretical ratios;
• and
• an optical path difference/shape converting means for determining a shape of the object to be measured on the basis of the optical path differences obtained by the optical path difference comparing/determining means.

A shape measuring apparatus characterized by comprising:

• a light source for emitting light;
• a color camera for picking up images of light interference fringes;
• a filter for transmitting a plurality of different color lights to the color camera;
• a reference reflective member for reflecting light;
• optical means for directing the light from the light source as an object light toward an object to be measured so as to direct and directing the light from the light source reference light so as to direct reflected light thereof from the reference reflective member toward the color camera;
• an image memory for storing images of the interference fringe formed by the lights from the optical means and picked up by the color camera;
• computing means for obtaining respective intensities of the color lights of the images at each of predetermined positions of each image, so as to compute an actual ratio among the obtained intensity of the color lights;
• a reference data memory for storing theoretical ratios among the intensities of said color lights in an image correspondingly to each of preset optical path differences;
• optical path difference comparing/determining means for determining differences at a plurality of points between an optical path between the optical means and the object to be measured and an optical path between the optical means and the reference reflective member according to the actually measured ratio and the theoretical ratio;
• and
• an optical path difference/shape converting means for determining a shape of the object to be measured on the basis of the optical path differences obtained by the optical path difference comparing/determining means.