Method of manufacturing a semiconductor device, having first and second semiconductor regions with field shield isolation structures and a field oxide film covering a junction between semiconductor regions
AssigneeNippon Steel Corporation
InventorsAtsushi Kawasaki, Kohei Eguchi, Katsuki Hazama, Fumitaka Sugaya
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Abstract
A semiconductor device has, in one embodiment, two wells of different conductivity types formed in a semiconductor substrate. The two wells are arranged to be adjacent to each other to form a junction therebetween. A field oxide film is formed to cover the junction at a main surface of the semiconductor substrate. Other field oxide films or field-shield isolation structures may be formed to isolate circuit elements from one another in the wells.
Claims2
A method of manufacturing a semiconductor device having an isolation structure using a field oxide film and an isolation structure using a shield gate electrode, comprising the steps of:
- forming field oxide films at a main surface of a semiconductor substrate by selective thermal oxidation;
- forming a first gate insulating film at the main surface of said substrate at portion where said field oxide films are not formed;
- patterning and forming a first conductor film to serve as a first gate electrode and a shield gate electrode on said first gate insulating film;
- removing said first gate insulating film in a region where said first conductor film is not formed to expose said substrate;
- forming a second gate insulating film on said substrate so exposed;
- and
- patterning and forming a second conductor film to serve as a second gate electrode on said second gate insulating film.
Dependencies are inferred from the claim text.