Method of fabricating a coated process chamber component
AssigneeApplied Materials, Inc.
InventorsYongxiang He, Hong Wang, Clifford Stow
Life of this patent
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Abstract
A method of fabricating a process chamber component that has a ceramic form with grains and grain boundary regions. In the method, the component is bead blasted to provide a surface having a relatively low roughness average of less than about 150 microinches. The component is dipped into a solution having a concentration that is sufficiently low to reduce etching of grain boundary regions of the ceramic form. A metal coating is formed over at least a portion of the ceramic form. The component fabricated by this method can tolerate thicker deposits of sputtered material in a sputtering process without the sputtered deposit accumulates causing spalling of the coating of the component.
Claims16
A method of fabricating a component for a process chamber, the component comprising a ceramic form having a surface with grains and grain boundary regions, and the method comprising:
- (a) bead blasting the surface of the component to provide a roughened surface having a roughness average of less than about 150 microinches, thereby forming surface debris and contaminants on the roughened surface;
- (b) dipping the roughened surface of the component into an solution having a concentration of acid or base that is (i) sufficiently high to clean surface debris and contaminants off the roughened surface, and (ii) sufficiently low to reduce etching damage of grain boundary regions of the ceramic form;
- and
- (c) forming a metal coating over at least a portion of the ceramic form.
A method of fabricating a component for a process chamber, the component comprising a ceramic form having aluminum oxide grains and grain boundary regions, and the method comprising:
- (a) bead blasting the component to provide a surface roughness having a roughness average of less than about 150 microinches;
- (b) dipping the component into a solution comprising an acidic agent, the acidic agent comprising one or more of HF, HCl, and HNO3, wherein the acidic agent is in a concentration of less than about 10 volume percent;
- and
- (c) forming an aluminum coating over at least a portion of the component by a twin-wire thermal spraying process.
A method of forming a component for a process chamber, the component comprising a ceramic form having aluminum oxide grains and grain boundary regions, and the method comprising:
- (a) bead blasting the component to provide a surface roughness having a roughness average of less than about 150 microinches;
- (b) dipping the component into a solution comprising one or more of KOH or diethylene glycol monobutyl ether in concentration of less than about 20 volume percent;
- and
- (c) forming an aluminum coating over at least a portion of the ceramic form by a twin wire thermal spraying process.
Dependencies are inferred from the claim text.