Solar control coated glass

A method of producing a tin oxide coated, solar control glass having low haze of less than about 2.0% and having a NIR solar absorbing layer and a low emissivity layer within said tin oxide coating, comprising a glass substrate and a doped tin oxide coating having at least two layers with one layer being a solar absorbing layer comprising SnO2 containing a dopant selected from the group consisting of antimony, tungsten, vanadium, iron, chromium, molybdenum, niobium, cobalt, nickel and mixtures thereof and another layer being a low emissivity layer comprising SnO2 containing a dopant of fluorine or phosphorus and, wherein a portion of said solar absorbing layer contains fluorine in sufficient quantity to reduce the rugosity and haze for said tin oxide coating and wherein the thickness of the NIR solar absorbing layer is from 200 to 320 nanometers (nm) and the thickness of the low emissivity layer is from 200 to 450 nm and the portion of said solar absorbing layer containing fluorine to reduce the rugosity comprises from 300 Angstroms (Å) to 600 Å of the thickness of the solar absorbing layer and is located either adjacent to the interface between the solar absorbing layer and the low emissivity layer, or is the portion of the solar absorbing layer that is closest to the glass substrate, comprising sequentially treating glass at a temperature above 400° C. with:

• a first carrier gas containing a source of oxygen, H2O, a tin precursor and a dopant precursor selected from the group consisting of antimony trichloride, antimony pentachloride, antimony triacetate, antimony triethoxide, antimony trifluoride, antimony pentafluoride, or antimony acetylacetonate to form by pyrolysis a NIR layer comprising SnO2 containing an antimony dopant;
• an anhydrous second carrier comprising oxygen, a tin precursor and a dopant precursor selected from the group consisting of antimony trichloride, antimony pentachloride, antimony triacetate, antimony triethoxide, antimony trifluoride, antimony pentafluoride, or antimony acetylacetonate, and a haze reducing quantity of a haze reducing additive selected from the group consisting of a precursor of fluorine, tetramethylcyclotetrasiloxane, HF, difluoroacetic acid, monofluoroacetic acid, antimony trifluoride, antimony pentafluoride, ethyl trifluoroacetoacetate, acetic, formic acid, propionic acid, methanesulfonic acid, butyric acid and its isomers, nitric acid or nitrous acid to form by pyrolysis a NIR layer comprising SnO2 containing an antimony dopant to form by pyrolysis a NIR layer comprising SnO2 containing an antimony dopant and having reduced rugosity that contributes to reduced haze;
• a third carrier gas comprising gas containing a source of oxygen, H2O, a tin precursor and a dopant precursor selected from the group consisting of trifluoroacetic acid, ethyltrifluoroacetate, difluoroacetic acid, monofluoroacetic acid, ammonium fluoride, ammonium bifluoride, and hydrofluoric acid, to form a low emissivity layer comprising SnO2 containing a fluorine dopant.