Process of fabricating a precision microcontact printing stamp
AssigneeInternational Business Machines Corporation
InventorsGareth Hougham, Peter Fryer, Ronald Nunes
Life of this patent
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Abstract
A process of making a microcontact printing stamp useful in microcontact printing of microcircuits. In this process an elastomeric microcontact printing stamp is formed by curing an elastomeric monomer or oligomer in a mold in which a photoresist master, defining a microcircuit in negative relief, is predisposed above a flat and rigid backplane laminate. The flat and rigid plane member of the backplane laminate is delaminated from the backplane after the printing stamp is removed from the mold.
Claims19
A process of making a microcontact printing stamp comprising the steps of:
- disposing a photoresist master, defining a microcircuit pattern in a negative relief, in a mold above a backplane laminate comprising a backplane bonded to a flat and rigid plane;
- introducing an elastomeric monomer or oligomer into said mold;
- curing said elastomeric monomer or oligomer in said mold wherein a cured elastomeric printing stamp imprinted with said microcircuit in positive relief, defined by said photoresist master, is formed;
- removing said cured elastomeric stamp from said mold;
- and
- delaminating said flat and rigid plane from said stamp.
A process of making a microcontact printing stamp comprising the steps of:
- disposing a photoresist master, defining a microcircuit in negative relief, in a mold above a backplane laminate of a backplane bonded to a flat and rigid plane;
- introducing a dimethylsiloxane-containing polymerizable composition into said mold;
- curing said polymerizable composition at a temperature in the range of between about 50° C. and about 70° C. whereby a silicone rubber printing stamp imprinted with a microcircuit in positive relief, defined by said photoresist master, is formed;
- removing said cured silicone rubber stamp from said mold;
- and
- delaminating said flat and rigid plane from said silicone rubber stamp.
Dependencies are inferred from the claim text.