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US 6,655,938 B2Granted
Screw-type dry vacuum pump having an enlarged casing portion
AssigneeEbara Corporation
InventorsKiyoshi Yanagisawa, Tokio Fukai
Life of this patent
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Abstract
A screw-type dry vacuum pump comprises a rotor having a screw thread thereon for exhausting a gas through rotation, a casing for housing the rotor therein, a reduced portion provided in the casing, and an enlarged portion provided on a discharge end of the casing. The reduced portion forms a slight gap between the outer circumferential surface of the rotor and the inner surface thereof. The enlarged portion forms a larger gap between the outer circumferential surface of the rotor and the inner surface thereof.
Claims7
A screw-type dry vacuum pump comprising:
- a rotor having a screw thread thereon for exhausting a gas through rotation;
- a casing for housing said rotor therein;
- a reduced portion provided in said casing, said reduced portion forming a slight gap between the outer circumferential surface of said rotor and the inner surface thereof,
- an enlarged portion provided on a discharge end of said casing, said enlarged portion forming a larger gap around the entire circumference of said rotor between the outer circumferential surface of said rotor and the inner surface thereof, such that said larger gap can collect and trap by-product residue away from said rotor.
1 more element
A screw-type dry vacuum pump comprising:
- a plurality of rotors each having a screw thread for exhausting a gas through rotation, said plurality of rotors being arranged in a series;
- a casing for housing said plurality of rotors;
- and
- a depression formed in said casing between the adjacent rotors, said depression provided with a discharge port and a cover for discharging accumulated reaction by products,
- an enlarged portion provided on a discharge end of said casing for each of said rotors, each said enlarged portion forming a larger gap around the entire circumference of said rotor between the outer circumferential surface of said rotor and the inner surface thereof, such that said larger gap can collect and trap by-product residue away from said rotor.
2 more elements
Dependencies are inferred from the claim text.