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US 6,655,898 B1Granted
Front opening unified pod (FOUP) hoist jig
AssigneeNEC Electronics Corporation
InventorsDavid Liu-Barba, Simon Tong
Life of this patent
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Abstract
An apparatus and method for simultaneously cycle-testing two wafer storage containers is provided. The two wafer containers are maintained in a counterbalance relationship to each other and cycled in a vertical up-and-down motion to simulate the forces of a selected overhead transport system.
Claims22
A hoist jig, comprising:
- a vertically upright center member having a first surface and a second surface;
- a base coupled to the center member;
- a first support arm coupled in a vertically slideable relationship to the first surface of the center member, the first support arm being configured to receive a first wafer storage container;
- a second support arm coupled in a vertically slideable relationship to the second surface of the center member, the second support arm being configured to receive a second wafer storage container;
- and
- a cycle mechanism that is operable to cycle the first wafer storage container and the second wafer storage container in a vertical up-and-down motion;
- wherein the cycle mechanism is further operable to maintain the first wafer storage container and the second wafer storage container in a counterbalanced relationship with each other;
- and
- wherein the cycle mechanism includes a motor.
6 more elements
A method of testing two wafer containers simultaneously, comprising:
- coupling a first wafer container to a first support arm, wherein the first support arm is coupled to a first surface of a center member;
- coupling a second wafer container to a second support arm, wherein the second support arm is coupled to a second surface of the center member;
- maintaining the first wafer container and the second wafer container in a counterbalanced relationship to each other;
- and
- cycling the first wafer container and the second wafer container in a vertical up-and-down motion at a speed that simulates the vertical forces exerted by a selected automated material handling system.
2 more elements
A hoist jig, comprising:
- means for coupling a first wafer container to a chain;
- means for coupling a second wafer container to a second surface of a chain;
- means for maintaining the first wafer container and the second wafer container in a counterbalanced relationship to each other;
- and
- means for repeatedly cycling the first wafer container and the second wafer container in a vertical up-and-down motion.
2 more elements
Dependencies are inferred from the claim text.