Sensor, in particular thermal sensor, and method for manufacturing a largely self-supporting membrane

A thermal sensor, comprising:

• a silicon element;
• at least one contact column;
• and
• a largely self-supporting membrane layer including at least one sensor elements, wherein the membrane layer is spaced from the silicon element by the at least one contact column and is largely supported by the at least one contact column, and wherein the at least one contact column forms an electrical contact with the at least one sensor element;
• wherein the at least one sensor element is a thermopile that includes at least one of a thermocouple and a thermoelectric element, and wherein the thermopile includes:
• a first thermomaterial,
• a second thermomaterial, and
• a thermojunction provided in at least single-point fashion.

A thermal sensor, comprising:

• a silicon element;
• at least one contact column;
• and
• a largely self-supporting membrane layer including at least one sensor element, wherein the membrane layer is spaced from the silicon element by the at least one contact column and is largely supported by the at least one contact column, and wherein the at least one contact column forms an electrical contact with the at least one sensor element;
• wherein the membrane layer is patterned such that end faces of the at least one contact column are not covered by the membrane layer.

A thermal sensor, comprising:

• a silicon element;
• at least one contact column;
• a largely self-supporting membrane layer including at least one sensor element, wherein the membrane layer is spaced from the silicon element by the at least one contact column and is largely supported by the at least one contact column, and wherein the at least one contact column forms an electrical contact with the at least one sensor element;
• and
• a thermal sensor array formed from a plurality of regularly arranged thermopiles provided on the membrane layer.