Focusing-device for the radiation from a light source
AssigneeCarl Zeiss SMT GmbH
InventorsMartin Antoni, Frank Melzer, Andreas Seifert, Wolfgang Singer
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Abstract
A focusing-device for the radiation from a light source, in particular a laser plasma source, has a collector mirror which collects the light from the light source at a second focus in virtual or real terms, in particular for micro-lithography using EUV radiation, and a routing unit and downstream beam formation in an illuminating system. The collector mirror can be displaced in the z-direction (optical axis) and is designed and/or mounted in such a way that the position of the second focus remains unchanged in the event of temperature changes.
Claims16
A focusing-device for the radiation from a light source, having a collector mirror which collects light from the light source located near its first focus with a first and a second focus lying on an optical axis at the second virtual or real focus, wherein the collector mirror can be displaced in the direction of the optical axis, and is constructed and/or mounted in such a way that the position of the second focus remains unchanged in the event of temperature changes.
Dependencies are inferred from the claim text.