Dual mask process for making second pole piece layer of multiple write heads with high resolution narrow track width second pole tip

A method of making multiple magnetic head assemblies wherein each magnetic head assembly includes a read head and a write head with each write head having first and second pole piece layers with a yoke portion between a pole tip portion and a back gap portion comprising the steps of:

• providing a wafer that has rows and columns of magnetic head assembly sites;
• a forming of a read head at each magnetic head site comprising the steps of:
• forming a nonmagnetic nonconductive first read gap layer on the wafer at the respective magnetic head assembly site;
• forming a read sensor with first and second side edges on the first read gap layer;
• forming first and second lead and hard bias layers at the first and second side edges respectively of the read sensor;
• forming a nonmagnetic nonconductive second read gap layer on the read sensor and first and second lead and hard bias layers;
• a forming of a write head on a respective read head at each magnetic head assembly site comprising the steps of:
• forming a seed layer on the wafer at the respective magnetic head assembly site;
• forming a first photoresist layer that is sensitive to light with wavelengths within a first bandwidth;
• forming on the first photoresist layer a second photoresist layer that is sensitive to light with wavelengths within a second bandwidth which is at least partially different from said first bandwidth;
• exposing the second photoresist layer to wavelengths of light within a third bandwidth at yoke, back gap and field sites wherein the yoke and back gap sites define a perimeter of said yoke and back gap portions and the field site includes at least a pole tip site for said pole tip portion;
• said third wavelength including at least a portion of the wavelengths of light from the second bandwidth but excluding wavelengths of light from the first bandwidth;
• developing the second photoresist layer so that the second photoresist layer has the yoke and back gap opening at yoke and back gap sites for said yoke and back gap portions and has at least a pole tip opening at said pole tip site for said pole tip portion;
• exposing the first photoresist layer to wavelengths of light within a fourth bandwidth at yoke, back gap and pole tip sites for defining a perimeter that defines the yoke, back gap and pole tip portions;
• said fourth bandwidth including at least a portion of said first bandwidth;
• developing the first photoresist layer so that the first and second photoresist layers have openings defining the yoke and back gap portions and the first photoresist layer has an opening defining said pole tip portion;
• plating the second pole piece layer with the yoke, back gap and pole tip portions in the yoke, back gap and pole tip openings of the first and second photoresist layers;
• and
• removing the first and second photoresist layers;
• removing the seed layer where exposed;
• forming an over coat layer on the substrate over each magnetic head assembly site;
• dicing the wafer and layers thereon into rows of partially completed magnetic head assemblies;
• lapping the rows of magnetic head assemblies to form each partially completed magnetic head assembly with an air bearing surface (ABS);
• and
• dicing the rows of partially completed magnetic head assemblies into individually completed magnetic head assemblies.