Buffer layer structures for stabilization of a lithium niobate device
AssigneeCodeon Corporation
InventorsWilliams K. Burns, Larry A. Hess, Vishal Agarwal
Life of this patent
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Abstract
An optical waveguide device including an electro-optical crystal substrate having a top surface and a bottom surface; an optical waveguide path formed within a surface of the electro-optical crystal substrate; at least one electrode positioned above the optical waveguide path for applying an electric field to the optical waveguide path; and a silicon titanium oxynitride layer and a connecting layer for interconnecting the silicon titanium oxynitride layer to another surface of the electro-optical crystal substrate that is opposite to the surface in which the optical waveguide path is formed.
Claims25
An optical waveguide device comprising:
- an electro-optical crystal substrate having a top surface and a bottom surface;
- an optical waveguide path formed within a surface of the electro-optical crystal substrate;
- at least one electrode positioned above the optical waveguide path for applying an electric field to the optical waveguide path;
- a silicon titanium oxynitride layer;
- and
- a connector for interconnecting the silicon titanium oxynitride layer to another surface of the electro-optical crystal substrate that is opposite to the surface in which the optical waveguide path is formed.
An optical waveguide device comprising:
- a Z-cut electro-optical crystal substrate having a top surface with a Z face and a bottom surface with a Z face;
- an optical waveguide path formed within the top surface of the electro-optical crystal substrate;
- a buffer layer structure, including a thermal stabilization buffer layer comprising silicon, an element in column 4 (IVB) of the periodic table, oxygen, and nitrogen, positioned above the optical waveguide path;
- at least one electrode positioned on the buffer layer structure for applying an electric field to the optical waveguide path;
- and
- a connecting layer on a side surface of the electro-optical crystal substrate for interconnecting the thermal stabilization buffer layer to the bottom surface of the electro-optical crystal substrate.
Dependencies are inferred from the claim text.