Method of manufacturing member pattern and method of manufacturing wiring, circuit substrate, electron source, and image-forming apparatus
AssigneeCanon Kabushiki Kaisha
InventorsYoshimi Uda, Kazuya Ishiwata
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Abstract
A method of manufacturing wiring includes a step of forming a conductive layer pattern through a developing step after performing film formation and exposure step using photosensitive paste that contains a photosensitive material and a conductive material, a step of forming an insulating layer pattern through a developing step after performing film formation and exposure step using photosensitive paste that contains a photosensitive material and an insulating material, and a baking step for baking the conductive layer pattern and the insulating layer pattern. Thus, a wiring pattern can be formed with high precision by reducing an edge curl.
Claims12
A method of manufacturing wiring comprising:
- a step of forming a conductive layer pattern through a developing step after performing film formation and exposure step once or several times using photosensitive paste that contains a photosensitive material and a conductive material;
- a step of forming an insulating layer pattern on at least a part of the conductive layer pattern through a developing step after performing film formation and exposure step once or several times using photosensitive paste that contains a photosensitive material and an insulating material;
- and
- a baking step for baking the conductive layer pattern and the insulating layer pattern thereby reducing an edge curl of the conductive layer pattern.
A method of manufacturing a member pattern with a first member patterned on a substrate and a second member patterned and extending over the first member onto the substrate, the method comprising:
- a step of applying first photosensitive paste onto the substrate;
- a step of forming a precursor pattern of the first member by exposing and developing the first photosensitive paste;
- a step of applying second photosensitive paste over the top face of the precursor pattern of the first member onto the substrate;
- a step of forming a precursor pattern of the second member by exposing and developing the second photosensitive paste;
- and
- a step of baking the precursor patterns of the first and second members thereby reducing an edge curl of the first member.
Dependencies are inferred from the claim text.