Self-cleaning nozzles of wet scrubber
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYi-Lang Ku, Chieh-Chung Wang
Life of this patent
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Abstract
A self-cleaning nozzle that can be used for wet scrubbers comprises an electromagnetic coil that, when energized, causes an outlet orifice of the nozzle to enlarge so that pollutant particles clogging the nozzle fall down the orifice unclogging it. The coil is in turn controlled by a signal responsive to an increased pressure in the pipe supplying the nozzle with water, which increase is indicative of clogging the nozzle.
Claims14
A method of waste gas treatment with the use of a wet scrubber comprising the steps of:
- pumping water under pressure through a pipe into at least one nozzle;
- passing waste gases through said scrubber;
- and
- spraying water in the scrubber out of the at least one nozzle, to thereby envelope pollutant particles in the waste gases and prevent them from being discharged into atmosphere,
- said method additionally comprising the steps of:
- monitoring the pressure in the pipe, and, upon exceeding by the pressure a preset value due to clogging an outlet orifice of the at least one nozzle by the pollutants,
- causing the outlet orifice to increase, whereby the pollutant particles fall down the outlet orifice unclogging the same.
A wet scrubber comprising a scrubber body, in which at least one nozzle is installed, a water reservoir and a pipe, through which a pump pumps water from the reservoir into the at least one nozzle, means monitoring water pressure in the pipe, control means controlled by the monitoring means when the water pressure exceeds a preset value due to clogging of the at least one nozzle by pollutant particles, and means unclogging the at least one nozzle in response to a signal from the control means.
A self-cleaning nozzle comprising
- a body defined by a top, a bottom, and walls,
- an inlet in the wall, through which inlet water is supplied into the nozzle,
- an outwardly diverging conical bore in the bottom, in which bore a coaxial conical member is installed, so that an outlet orifice, through which water is sprayed out of the nozzle, is defined by a distance between walls of the bore and the coaxial conical member,
- an electromagnetic coil,
- the coaxial conical member being rigidly affixed to the coil, and the body having a spring-biased connection to the coil,
- so that when the coil is energized, relative arrangement of the body and the coil changes in the way to increase the distance between walls of the bore and the coaxial conical member, whereby pollutant particles clogging the outlet orifice are caused to fall down the outlet orifice unclogging the same.
Dependencies are inferred from the claim text.