Systems and methods of monitoring thin film deposition
AssigneeAgilent Technologies, Inc.
InventorsJohn D. Larson, III, Herbert L. Ko, Richard K. Karlquist, Mark A. Hueschen, Kent W. Carey
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Abstract
Systems and methods of monitoring thin film deposition are described. In one aspect, a thin film deposition sensor includes an acoustical resonator (e.g., a thin film bulk acoustical resonator) that has an exposed surface and is responsive to thin film material deposits on the exposed surface. A substrate clip may be configured to attach the thin film deposition sensor to a substrate. A transceiver circuit may be configured to enable the thin film deposition sensor to be interrogated wirelessly. A method of monitoring a thin film deposition on a substrate also is described.
Claims25
A system for monitoring a thin film deposition on a substrate in a vacuum deposition chamber, comprising:
- a thin film deposition sensor having an exposed surface and being responsive to thin film material deposits on the exposed surface;
- and
- a substrate clip configured to attach the thin film deposition sensor to the substrate so that the thin film deposition sensor and the substrate are exposable to substantially similar conditions during the thin film deposition in the vacuum chamber.
A system for monitoring a thin film deposition on a substrate, comprising:
- a thin film deposition sensor having an exposed surface and being responsive to thin film material deposits on the exposed surface;
- and
- a substrate clip configured to attach the thin film deposition sensor to the substrate, wherein the substrate clip comprises an antenna.
A system for monitoring a thin film deposition on a substrate, comprising:
- a thin film deposition sensor having an exposed surface and being responsive to thin film material deposits on the exposed surface;
- and
- a substrate clip configured to attach the thin film deposition sensor to the substrate, wherein the substrate clip comprises a transceiver circuit configured to enable the thin film deposition sensor to be interrogated wirelessly.
A method of monitoring a thin film deposition on a substrate in a vacuum deposition chamber, comprising:
- attaching a thin film deposition sensor to the substrate;
- disposing the substrate and the attached thin film deposition sensor within the vacuum deposition chamber;
- exposing the substrate and the attached thin film deposition sensor to a thin film deposition;
- and
- interrogating the attached thin film deposition sensor to monitor the thin film deposition.
Dependencies are inferred from the claim text.