Apparatus for automatically measuring the resistivity of semiconductor boules by using the method of four probes
AssigneeG.T. Equipment Technologies, Inc.
InventorsMohan Chandra, David M. Darling, L. Dolan Roman, Carl P. Chartier, Glen Alan Burgess
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Abstract
An apparatus for the automated measurement and recording of the electrical resistivity of a semiconductor boule or ingot using the method of four probes has a four point boule support grid is provided adjacent to the home position of a four tip probe which is equipped with three axis linear mobility, rotational capability, and computer control, to provide automated mapping and testing of an “as grown” or ground semiconductor boule with cropped ends, for obtaining and recording resistivity data.
Claims5
A measurement apparatus for use with a computer processor for the automated measuring of resistivity of semiconductor boules according to a four probe methodology, comprising
- a four point probe having a home position and being movable along three axes and rotatory around at least one axis for departing from and returning to said home position, said four point probe connected to a power source and connectible to said computer processor, said four point probe connected to a current source and a current sensor according to said four probe methodology, and further connectible and controllable by said computer processor,
- a boule support grid for supporting a boule with a first face end and a second face end in a horizontal orientation with said first face end near said home position, and with said first face end and the underside surface centerline and said second face end exposed for access by and being within reach of said four point probe,
- at least one boule surface sensor on said four point probe for detecting proximity of said four point probe to a surface of said boule.
Dependencies are inferred from the claim text.