Integrated process tool monitoring system for semiconductor fabrication
AssigneeLSI Logic Corporation
InventorsAttila Balazs, Bruce Whitefield, Hiroshi Mizuno, Russell Whaley, Paul Szasz, Steven Reder
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Abstract
An integrated process tool monitoring system for semiconductor fabrication. Specifically, a process tool parameter auditing system, where a process tool user need not run a different verification system for each process tool type used and need not download parameters every time before a semiconductor device or material is to be processed by the process tool.
Claims13
A method of auditing process tool parameters for semiconductor fabrication, said method comprising:
- activating a system;
- uploading the process tool parameters to the system, whereafter the system automatically uses reference data to audit the process tool parameters regardless of whether the process tool parameters have been edited, and thereafter transmits an alarm if the parameters are determined by the system to be incorrect with regard to the reference data.
A method of auditing process tool parameters tool for semiconductor fabrication, said method comprising:
- providing a system which is activatable;
- maintaining reference data which the system can use;
- having the system receive the process tool parameters, whereafter the system uses the reference data to audit the process tool parameters regardless of whether the process tool parameters have been edited, and whereafter the system transmits an alarm if the process tool parameters are determined by the system to be incorrect with regard to the reference data.
An auditing system for auditing process tool parameters for semiconductor fabrication, said auditing system comprising:
- a first system configured to use reference data to audit process tool parameters regardless of whether the process tool parameters have been edited and transmit an alarm if the process tool parameters are determined by the system to be incorrect with regard to the reference data;
- a second system in communication with the first system and connected to the process tool, said second system configured to transmit the process tool parameters to the first system for auditing.
Dependencies are inferred from the claim text.