Method and apparatus for determining a sampling plan based on process and equipment fingerprinting

A processing line, comprising:

• a processing tool configured to process workpieces;
• a metrology tool configured to measure an output characteristic of selected workpieces in accordance with a sampling plan;
• a processing monitor configured to collect tool state trace data during the processing of at least one workpiece in the processing tool to generate a fingerprint, compare the generated fingerprint to a library of reference fingerprints, each reference fingerprint having an associated processing metric, and select the reference fingerprint closest to the generated fingerprint to identify a processing metric;
• and
• a sampling controller configured to receive the processing metric and determine the sampling plan for the metrology tool based on the processing metric.

A processing line, comprising:

• a processing tool configured to process workpieces;
• a metrology tool configured to measure an output characteristic of selected workpieces in accordance with a sampling plan;
• a processing monitor configured to collect tool state trace data during the processing of at least one workpiece in the processing tool to generate a fingerprint, generate an expected fingerprint associated with the processing of the at least one workpiece, compare the expected fingerprint with the generated fingerprint, and determine a processing metric based on the comparison;
• and
• a sampling controller configured to receive the processing metric and determine the sampling plan for the metrology tool based on the processing metric.

A method for processing workpieces, comprising:

• processing a plurality of workpieces in a processing tool;
• measuring a characteristic of selected workpieces in accordance with a sampling plan;
• monitoring the processing of at least one workpiece in the processing tool to generate a fingerprint;
• determining a processing metric based on the fingerprint;
• and
• determining the sampling plan based on the processing metric.

A method for processing workpieces, comprising:

• processing a plurality of workpieces in a processing tool;
• measuring a characteristic of selected workpieces in accordance with a sampling plan;
• collecting tool state trace data associated with the processing of at least one workpiece in the processing tool to generate a fingerprint;
• comparing the generated fingerprint to a library of reference fingerprints, each reference fingerprint having an associated processing metric;
• selecting the reference fingerprint closest to the generated fingerprint to identify a processing metric;
• and
• determining the sampling plan based on the processing metric.

A method for processing workpieces, comprising:

• processing a plurality of workpieces in a processing tool;
• measuring a characteristic of selected workpieces in accordance with a sampling plan;
• collecting tool state trace data associated with the processing of at least one workpiece in the processing tool to generate a fingerprint;
• generating an expected fingerprint associated with the processing of the at least one workpiece;
• comparing the expected fingerprint with the generated fingerprint;
• determining a processing metric based on the comparison;
• determining the sampling plan based on the processing metric.

An apparatus, comprising:

• means for processing a plurality of workpieces;
• means for measuring a characteristic of selected workpieces in accordance with a sampling plan;
• means for monitoring the processing of at least one workpiece to generate a fingerprint;
• means for determining a processing metric based on the fingerprint;
• and
• means for determining the sampling plan based on the processing metric.