Methods for forming separately optimized waveguide structures in optical materials
OwnerKonstantin P. Petrovinventor
Life of this patent
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Abstract
A method for forming plural waveguide structures in an optical substrate, such as lithium niobate, employs multiple stages of annealed proton exchange. In each stage, the substrate is masked to define a region corresponding to at least one waveguide structure. The mask-defined region is exposed to a proton exchange agent for a predetermined time and at a predetermined temperature, and the substrate is then annealed at predetermined time/temperature conditions. By selecting appropriate process parameters for each APE stage, each of the resultant waveguide structures may be optimized for desired physical and optical characteristics. The method may be utilized, for example, to fabricate sub-Rayleigh range couplers having high coupling efficiencies.
Claims17
A method for forming plural waveguide structures in a lithium niobate substrate having a major surface, comprising the steps of:
- (a) exposing a first region of said major surface to a first proton exchange agent at first proton exchange conditions;
- (b) annealing said substrate at first anneal conditions;
- (c) exposing a second region of said major surface different from said first region to a second proton exchange agent at second proton exchange conditions;
- and
- (d) annealing said substrate at second anneal conditions;
- wherein said first proton exchange conditions and said first anneal conditions are selected to produce a first set of optical and physical characteristics in at least a first waveguide structure underlying said first region, and said second proton exchange conditions and said second anneal conditions are selected to produce a second set of optical and physical characteristics in at least a second waveguide structure underlying said second region.
An article having at least first and second waveguide structures formed in an optical substrate, said article being constructed by:
- (a) exposing a first region of a major surface of said substrate to a first proton exchange agent at first proton exchange conditions;
- (b) annealing said substrate at first anneal conditions;
- (c) exposing a second region of said major surface different from said first region to a second proton exchange agent at second proton exchange conditions;
- and
- (d) annealing said substrate at second anneal conditions;
- wherein said first proton exchange conditions and said first anneal conditions are selected to produce a first set of optical and physical characteristics in at least a first waveguide structure underlying said first region, and said second proton exchange conditions and said second anneal conditions are selected to produce a second set of optical and physical characteristics in at least a second waveguide structure underlying said second region.
Dependencies are inferred from the claim text.