Multi-level waveguide
AssigneeIntel Corporation
InventorVenkatesan Murali
Life of this patent
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Abstract
A multi-level waveguide to transmit light through a series of substrates. The multi-level waveguide is made up of stacked substrates, each containing a two dimensional array of transparent material filled vias. Transparent materials such as optical fiber, cladding, and gas may be used to provide a pathway for light. Optionally, a conductive layer may be deposited on a substrate in the multi-level waveguide. The conductive layer can then interact with the multi-level waveguide through light detecting devices such as photodetectors.
Claims13
A method of making a multi-level waveguide comprising:
- etching a hole in a first substrate;
- etching a hole in a second substrate;
- lithographically aligning said first substrate hole to said second substrate hole;
- and
- attaching said first substrate to a second substrate, said first substrate hole and said second substrate hole together form said multi-level waveguide.
A method of making a multi-level waveguide comprising:
- etching a hole in a first substrate;
- etching a hole in a second substrate;
- heating said first substrate;
- inserting an optical fiber into said first substrate hole;
- lithographically aligning said first substrate to said second substrate;
- and
- attaching said first substrate to said second substrate.
Dependencies are inferred from the claim text.